The preparation process of zirconium targets includes the following main steps:
Smelting: High-purity zirconium oxide is reduced to metallic zirconium at high temperature through an arc furnace or an induction furnace. The temperature and atmosphere need to be strictly controlled during the process to prevent impurities from mixing in. Casting: The smelted zirconium metal is cast into ingots through a mold. The casting process is carried out in a high-purity inert gas environment to ensure the purity and structural integrity of the material. Rolling: The cast zirconium ingot is hot-rolled and cold-rolled to form zirconium targets of the required thickness and shape. The density and uniformity of the material are gradually improved by repeated heating and cooling during the rolling process. Surface treatment: The zirconium target needs to be surface treated before use to remove the oxide layer and other surface impurities. Common treatment methods include chemical polishing and mechanical polishing. Quality control: The purity and uniformity of the zirconium target are strictly tested by advanced equipment such as X-ray fluorescence spectrometer (XRF) and inductively coupled plasma mass spectrometer (ICP-MS) to ensure that it meets the requirements of high-tech applications.
Zhenan zirconium target product pictures display
