99.95% W Sputtering Targets
1. The influence of sintering temperature
The forming process of tungsten target embryo is generally produced by cold isostatic pressing. The tungsten grains will grow during the sintering process. The growth of tungsten grains will fill the gaps between grain boundaries, thus improving the quality of the tungsten target. Density. As the number of sintering times increases, the density increase of the tungsten target material gradually slows down. The main reason is that after multiple sinterings, the quality of the tungsten target has not changed much. Since most of the gaps in the grain boundaries are filled by tungsten crystals, after each sintering, the overall size change rate of the tungsten target has changed. It is very small, resulting in limited space for increasing the density of the tungsten target. As sintering proceeds, the grown tungsten grains fill the gaps, resulting in a denser target with smaller particle size.
99.95% Tungsten Titanium Sputtering Target
2. The influence of holding time
Under the same sintering temperature, as the sintering holding time is extended, the density of the tungsten target is correspondingly improved. As the holding time is extended, the tungsten grain size increases, and as the holding time is extended, the grain size of the tungsten target increases. The increase in grain size gradually slows down, which shows that increasing the holding time can also improve the performance of tungsten targets.
99.95% WTi
3. Effect of rolling on target performance
In order to increase the density of the tungsten target material and at the same time obtain the processing structure of the tungsten target, the medium-temperature rolling of the tungsten target must be performed below the recrystallization temperature. If the rolling temperature of the target blank is high, the fiber structure of the target blank will be coarse, and conversely, the fiber structure of the target material will be fine. When the warm rolling processing rate reaches above 95%. Although the original grains of sintering are different or the differences in fiber structure caused by different rolling temperatures will be eliminated, the internal structure of the target will form a more uniform fiber structure. Therefore, the higher the processing rate of warm rolling, the better the performance of the target. good.
